JPH0423102Y2 - - Google Patents

Info

Publication number
JPH0423102Y2
JPH0423102Y2 JP13876286U JP13876286U JPH0423102Y2 JP H0423102 Y2 JPH0423102 Y2 JP H0423102Y2 JP 13876286 U JP13876286 U JP 13876286U JP 13876286 U JP13876286 U JP 13876286U JP H0423102 Y2 JPH0423102 Y2 JP H0423102Y2
Authority
JP
Japan
Prior art keywords
unit
plate
rail
bolt
rail plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13876286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6343975U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13876286U priority Critical patent/JPH0423102Y2/ja
Publication of JPS6343975U publication Critical patent/JPS6343975U/ja
Application granted granted Critical
Publication of JPH0423102Y2 publication Critical patent/JPH0423102Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Handcart (AREA)
JP13876286U 1986-09-09 1986-09-09 Expired JPH0423102Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13876286U JPH0423102Y2 (en]) 1986-09-09 1986-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13876286U JPH0423102Y2 (en]) 1986-09-09 1986-09-09

Publications (2)

Publication Number Publication Date
JPS6343975U JPS6343975U (en]) 1988-03-24
JPH0423102Y2 true JPH0423102Y2 (en]) 1992-05-28

Family

ID=31044036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13876286U Expired JPH0423102Y2 (en]) 1986-09-09 1986-09-09

Country Status (1)

Country Link
JP (1) JPH0423102Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339665A (ja) * 2000-10-12 2006-12-14 Ebara Corp 半導体基板製造装置

Also Published As

Publication number Publication date
JPS6343975U (en]) 1988-03-24

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